AFM calibration

Calibration grating  TGZ4 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.

Test grating TGG1 is intended for:

  • SPM calibration in X or Y axis;
  • detection of lateral and vertical scanner nonlinearity;
  • detection of angular distortion;
  • tip characterisation

Test grating TGX1 is intended for:

  •                       lateral calibration of SPM scanners;
  •                       detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
  •                       determination of the tip aspect ratio.