Calibration grating  TGZ4 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
 
 
 
 
 
 
 
 
 
 

Grating description

Structure:
- Si wafer
- the grating is formed on the layer of SiO2
Pattern types:
1- Dimensional (in Z-axis direction)
Step height:
TGZ4 - 1317±10 nm
Period:
3±0,05 µm
Chip size:
5x5x0,5 mm
Effective area:
central square 3x3 mm

Fig.1 SEM photo of grating TGZ series