Calibration grating TGZ4 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating description
Structure:
|
- Si wafer
- the grating is formed on the layer of SiO2 |
Pattern types:
|
1- Dimensional (in Z-axis direction)
|
Step height:
|
TGZ4 - 1317±10 nm
|
Period:
|
3±0,05 µm
|
Chip size:
|
5x5x0,5 mm
|
Effective area:
|
central square 3x3 mm
|
Fig.1 SEM photo of grating TGZ series