AFM calibration
Test grating TGQ1 is intended for:
- simultaneous calibration in X, Y and Z directions;
- lateral calibration of SPM scanners;
- detection of lateral non-linearity, hysteresis, creep and cross-coupling effects.
Test grating TGT1 is intended for:
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
Calibration grating TGZ3 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Calibration grating TGZ1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Calibration grating TGZ2 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
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