Test grating TGT1 is intended for:
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
Grating description
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Structure: |
the grating is formed on Si wafer top surface |
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Pattern types: |
array of sharp tips |
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Tip angle: |
50±10 degrees (on the very tip end) |
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Tip curvature radius: |
≤10nm |
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Period: |
3±0,05µm |
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Diagonal period: |
2,12µm |
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Chip size: |
5x5x0,5mm |
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Effective area: |
central square 2x2mm |
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Height, h: |
0,3-0,5µm |
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Fig.1 SEM images of TGT1 grating
Images courtesy Dr.John Mamin,
IBM Research Division