A residual gas system configured for molecular beam epitaxy applications
Measures residual gases and provides for contamination and leak detection in MBE systems
The Hiden HALO systems are designed for RGA, gas analysis and process monitoring applications including leak detection, trend analysis and vacuum survey.
Overview
The MBE specific analyser is constructed from compatible materials and designed for prolonged use in MBE environments and include
Features
- Molybdenum wiring in place of copper wiring to improve RGA system lifetime in MBE environments
- Contamination resistant ion source shroud
- Dual Faraday/channelplate electron multiplier
- Minimum detectable partial pressure to 2 x 10-13 mbar
- Thermal extender option for RGA operation during bakeout
Specifications
|
Mass range |
200 or 300 amu |
|
Minimum detectable partial pressure |
2 x 10-13 mbar |
|
Leak detect mode |
Set to use helium search gas as standard |
|
Detector |
Faraday cup and Electron multiplier |
|
Quadrupole gauge construction configured for MBE |
Yes |
|
Molybdenum gauge wiring instead of copper |
Yes |
|
Ion source shroud to prevent contamination |
Yes |
|
Thermal extender for RGA operation during bakeout |
Yes (Optional) |
|
Mounting flange |
DN-35-CF (70mm OD Conflat type) |