A system for high precision scientific and process applications
Measures the partial pressures of residual gases with ultra high resolution and extended mass range options to 1000 AMU
The HAL 3F RC systems are designed for gas analysis in high precision scientific and process applications.
Overview
The HAL 3F RC systems are designed for gas analysis in high precision scientific and process applications.
The triple filter quadrupole minimises contamination from unwanted ions, where the pre and post RF only filters work at different selected frequency from that of the main mass filter. In combination with the longer mass filter and wider rod diameter of 9 mm, this results in increased mass resolution, ion sensitivity, stability for precision/ratio measurements and high mass transmission.
Features
- Mass range 50, 300, 510, 1000 amu, 6mm and 9 mm molybdenum pole designs
- Increased mass resolution, high mass transmission, and ion stability
- Full electron energy control 0-150 eV for complementary TIMS analysis mode
- Available with SEM or PIC detection or optional dual Faraday/SEM or Faraday/PIC models
Specifications
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Mass range |
50, 300, 510, or 1000 amu |
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Minimum detectable concentration |
2 x 10-14 mbar |
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Ion Source |
Range of electron impact ion source types available |
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Ion Source control |
Yes |
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Electron emission |
Software variable 1µA to 2mA |
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Electron energy |
Software variable 0V to 150 eV |
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Ion energy |
Software variable 0V to 10 eV |
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Detector |
Faraday cup and electron multiplier |
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Analyser mounting flange |
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6mm pole diameter Mounting flange 9mm pole diameter Mounting flange |
DN-63-CF (4.5"/114mm OD Conflat type) DN-100-CF (6"/150mm OD Conflat type) |
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6mm pole diameter systems adaptor 9mm pole diameter systems adaptor |
DN-35-CF (2.75”/70mm OD Conflat type) DN-63-CF (4.5”/114mm OD Conflat type) |