EQS

A SIMS analyser 

When used in a SIMS or FIB-SEM system - provides for surface composition analysis and elemental mapping

The Hiden EQS is a high transmission quadrupole secondary ion mass spectrometry, SIMS, detector including a 45 degree electrostatic sector for simultaneous ion energy analysis. Ions are collected on the axis of the device which makes it very popular for fitting as an after-market detector to a wide variety of surface analysis instrumentation.

Overview

The standard EQS can also be used to monitor the residual gas using an electron impact ionizer sited within the device. This can be employed for detection of sputtered neutrals, although the distance from sample to the ionizer leads to a low sensitivity.

Features

  • High Sensitivity Pulse Ion Counting detector with 7 decade dynamic range
  • Raster Control for enhanced depth profiling and imaging with integrated signal gating
  • 45° Electrostatic Sector analyser, scan energy at 0.05 eV increments/ 0.25eV FWHM
  • Minimum perturbation of ion flight path & constant ion transmission at all energies
  • Triple filter Quadrupole, mass options to 2500 amu
  • Penning Gauge and interlocks to provide over pressure protection
  • Differentially pumped option for use in high pressure environments
  • MASsoft control via RS232, RS485 or Ethernet LAN
  • Easily interfaced to existing systems

Specifications

Mass range

300, 510 or 1000 amu

Ion analysis

Positive and negative ions

Ion energy analysis

100eV, 1000eV option,

Sensitivity

> 106 counts/second per nanoamp for Aluminium

Residual gas analysis mode- RGA

Leak detection and chamber vacuum analysis

SIMS - Secondary Ion Mass Spectrometry

Yes

Analysis of ions ejected from sample surface

Yes (primary ions of oxygen, argon or caesium)

FIB-SEM microscopy SIMS

Yes

Fine-focus electron beam microscope compatible

Yes (E.g. FIB-SEM - Zeiss Auriga 60)