Il Confotec NR500 è un microscopio confocale 3D completamente automatizzato con uno spettrometro, progettato per analisi rapide e non distruttive delle proprietà fisiche e chimiche di micro-oggetti o nanostrutture, e per ottenere informazioni su una sostanza mediante spettroscopia ottica.
Features
Applications
|
Signal decrease from 90 % to 10 % at 200 nm, λ=514 nm, 100Х immersion lens |
Resolution along Z-axis.
|
|
Specially designed monochromator-spectrograph with unique parameters:
|
|
Raman spectrum of Si wafer. Si (4) peak is clearly detected. Si (1) and Si (2) are in deep saturation. Confocal mode. Accumulation time - 60 seconds.
|
Specifications
Laser | Objective lens: magnification and numerical aperture NA |
XY Spatial resolution |
Z Spatial resolution |
488 nm | 100X, NA = 0.95 | 295 nm | 450 nm |
633 nm | 100X, NA = 0.95 | 395 nm | 590 nm |
785 nm | 100X, NA = 0.95 | 560 nm | 750 nm |
Spectral range for Raman spectra detection: | 30 cm -1 ~ 6000 cm -1 (depends on the wavelength of the excitation laser) |
Spectral resolution: | 0,25 cm-1 (75 l/mm Echelle grating) |
Sensitivity: | peak of the 4th order of the Raman spectrum of Si is detected within 1 min |
Modes of scanning: | - Fast mapping: scanning of a laser beam along the surface of a sample with XY galvanoscanner
- shifting a sample with XY motorized scanning stage near a fixed laser beam - combined mode for fast obtaining panoramic images with high spatial resolution: XY scanner (Fast mapping) + motorized microscope stage |
Maximum scanning field size in the "Fast mapping" mode: | XY 150 х 150 μm (with objective lens 100х) |
Period of registration for one frame 150 х 150 μм in the "Fast mapping" mode: | 3 s. / 1001 х 1001 pixels |
PC control: | fully automated |
Microscope
*Type, model: | inverted Nikon Ti-S and upright Nikon Ni-U |
Motorized scanning stage: | automated |
- travel range | 114 х 75 mm |
- accuracy (1 mm of shift) | 0.06 μm |
- XY repeatability | ± 1 μm |
- minimal step | 0.02 μm |
Micro objective lens: | 100х NA-0.95 40х NA-0.75 20х NA-0.50 and other |
Z-scanner: | piezo scanner |
- objective translation range | 80 μm |
- objective translation step | 50 nm |
- repeatability | < 6 nm |
High-resolution digital video camera: | digital color CCD camera |
- sensor | 1/2", 2048 x 1536 pixels |
- ADC | 10 bit, speed 12 frames/s |
Laser radiation delivery: | three-position turret |
* other types of inverted or upright microscopes available
Optical-mechanical unit (OMU)
Optimized optics for spectral range: | 325 - 1050 nm (UV-VIS-NIR) 400 - 1100 nm (VIS-NIR) |
Laser radiation delivery: | triple- and quintuple input port |
Laser beam attenuator: | automated unit with VND filter, 0 - 3D |
Polarizers (excitation channel) and analyzer (detection channel): |
Glan-Taylor prism (automated unit) |
Laser beam expander: | automated vario telescope, magnification factor 1.0 – 4.0x |
Half-wave (λ/2) plate positioner: | automated three- / five-postion |
Raman filter positioner: | automated three- / five-postion |
Interference filter positioner: |
automated six-position |
Pre-pinhole objective lens positioner: | automated three-coordinated (X, Y, Z) |
Imaging Monochromator-Spectrograph MS5004i
Optical configuration: | vertical |
Focal length: | 520 mm |
Magnification: | 1.0 vertical, 1.0 horizontal |
Vertical spatial resolution: | < 20 μm |
Flat field size: | 28 х 5 mm |
Stray light: | 1 х 10-5 (20 nm from laser line 633 nm) |
Diffraction grating unit: | automated four-position turret |
Spectral resolution: (wavelength 500 nm, CCD pixel 12 x 12 μm) |
0.25 cm-1 (Echelle grating 75 l/mm) 0.9 cm-1 (grating 1800 l/mm) |
Spectral slits: | |
- entrance | automated confocal pinhole, smoothly regulated from 0 to 1.5 mm |
- output | automated, smoothly regulated from 0 to 2 mm |
Ports: | 1 input, 2 output |
Output ports switching: | automated output mirror |
Spectral camera for spectrograph
Type: | digital CCD camera |
Sensor type: | back-thinned CCD sensor 2048 х 122 pixels |
Pixel size: | 12 x 12 μm |
Pixel area size: | 24.576 x 1.464 mm (width x height) |
Spectral response range: | from 200 to 1100 nm |
Cooling with temperature stabilization: | two-stage Peltier element, min – 45 °С |
ADC: | 16 bit |
Sensivity: | 1 photon for 1 ADC reading (at the max. sensivity of 650 nm) |
Dynamic range: | not less than 10 000 |
Fast scanning unit X, Y
Scanners: | galvanometer scanners with X, Y mirrors |
Scanning modes: | raster high-speed and start-stop |
Positioning accuracy: | 30 nm |
Scanning area: | 150 μm х 150 μm (with 100Х objective lens) |
Scanning speed: | 3 s/frame 1001 х 1001 pixels |
Unit of confocal laser microscope
Pre-pinhole objective lens positioner: | automated three-coordinate (X, Y, Z) |
Confocal pinhole: | automated confocal pinhole, smoothly regulated from 0 to 1.5 mm |
Detector: | Hamamatsu Photosensor module H6780-01 |
Lasers
Type of laser: | Up to 5 lasers can be used simultaneously | |
Wavelength, nm | Output power, mW | |
He-Cd Laser (Single Mode (TEM00) He-Cd): | 325 | 15, 30, 40, 50 |
Diode-pumped Laser (DPSS): | 473 | 25, 50 |
Diode-pumped Laser (DPSS): | 532 | 25, 50 |
He-Ne Laser: | 633 | 10 |
Diode-pumped laser (DPSS): | 785 | 80 |
Using of other types of lasers with wavelength from 350 to 850 nm is possible |