Noncontact/semicontact probes NSG03 series with Pt conductive and reflective coatings, resonant frequency 47-150kHz, force constant 0,35-6,1N/m.

 

NSG03/Pt series specification

Material

Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped

Chip size

3.4x1.6x0.3mm

Reflective side

PtIr

Conductive coating

PtIr (25nm), Cr adhesion layer (25A)

Cantilever number

1 rectangular

Tip curvature radius

~ 35nm

Also available coatings

conductive TiN, Au

Available NSG03 probe 

bare, tipless, with Al reflective coating

 

  

Cantilever series

Cantilever length, L±5µm

Cantilever width, W±3µm

Cantilever thickness,

T±0.5 µm

Resonant frequency, kHz

Force constant, N/m

min

typical

max

min

typical

max

NSG03

135

30

1.5

47

90

150

0.35

1.74

6.1