A system for UHV analysis of neutrals, radicals and ions

Measures the ions, neutrals,  and partial pressures in UHV/XHV

The Hiden EPIC and IDP have all the features of high performance RGAs - but with the addition of pole bias mid-axis potential and negative ion capability making them outstanding research grade mass spectrometers.

Overview

The EPIC system is factory-upgradeable for the inclusion of an energy-filter, either the Bessel box or 45 degree sector field type, ensuring compatibility with the Hiden plasma/SIMS series including the EQP, EQS, PSM and SIM probes.

Features

• Mass range options to 2500 amu, 6 or 9 mm pole diameter options
• Enhanced long-term Stability (less than ±0.5% height variation over 24 h)
• Ion Energy distribution by mid-axis potential scanning ±100 V, 1000 eV Option
• Ion source control for soft ionisation and appearance potential mass spectrometry
• Enhanced sensitivity for high mass transmission, Automatic mass scale alignment
• Pulse Ion Counter for continuous 1: 10⁷ c/s decade dynamic range
• Extended dynamic range  to 5x10¹⁰ c/s with Faraday option
• Enhanced contamination resistance via the RF-only pre-filter stage
• Signal gating 100 nano second resolution for energy & mass distributions vs time or TOF studies
• Temperature reading integrated into data displays for thermal desorption applications
• Integral UHV compatible shroud, Liquid Nitrogen cooled shroud option
• MASsoft control via RS232, USB or Ethernet LAN
• Upgradeable to Plasma / SIMS specification

Specifications