 Il reticolo di diffrazione TDG01 serve per la calibrazione nella scala submicrometrica dei microscopi a scansione di sonda (SPM) nelle direzioni X e Y.
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TDG01
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Diffraction Grating TDG01
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Diffraction grating TDG01 is intended for submicron calibration scanning probe microscopes (SPM) in the X or Y direction.
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Grating description
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Structure:
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- glass wafer
- the grating is formed on the layer of chalcagenid glass
- the grating top surface is aluminium
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Pattern types:
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1- Dimensional (in the X or Y direction)
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Pattern height:
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> 55 nm provides good image contrast
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Geometry:
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parallel ridges
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Period:
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278 nm (3600 periods/mm)
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Accuracy:
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±1nm
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Size:
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diameter 12,5 mm, thickness - 2,5 mm
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Effective area:
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central diameter 9 mm.
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Fig.1 TDG01 grating
The image was obtained in the semi-contact mode on the microscopе SOLVER P47H (NT-MDT Co.)
Copyright © 2003, Nano Technology Instruments - Europe BV.
Copyright © 1998-2003, NT-MDT. All rights reserved.
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