 Il reticolo TGQ1 serve per la calibrazione simultanea nelle direzioni X, Y e Z.
TGQ1
Test grating TGQ1 is intended for:
- simultaneous calibration in X, Y and Z directions;
- lateral calibration of SPM scanners;
- detection of lateral non-linearity, hysteresis, creep and cross-coupling effects.
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Grating description
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Structure
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the grating is formed on Si wafer top surface
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Pattern types
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3-Dimensional array of small squares
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Period
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3.0±0,05 mm
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Height
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19,5nm ±1,5 nm
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Square side size:
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1,5±0,15 mm
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Chip size
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5x5x0,5 mm
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Effective area
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central square 3x3 mm
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Fig.1 SPM image of TGQ1 grating
Copyright © 2003, Nano Technology Instruments - Europe BV.
Copyright © 1998-2003, NT-MDT. All rights reserved.
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