Set di reticoli per la calibrazione di SPM lungo l'asse Z con tre diversi range di altezza: 20nm, 100nm, 500m.
TGS1
| Grating set TGS1 |
Calibration grating set TGS1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 3 grating TGZ1, TGZ2, TGZ3 with different step heights.
| Grating description | |
| Structure: | - Si wafer - the grating is formed on the layer of SiO2 |
| Pattern types: | 1- Dimensional (in Z-axis direction) |
| Step height: | TGZ1 - 18,5±1nm TGZ2 - 108,5±2nm TGZ3 - 535±4nm |
| Period: | 3±0,1µm |
| Chip size: | 5x5x0,5mm |
| Effective area: | central square 3x3mm |
Fig.1 SEM photo of TGZ3 grating
Copyright © 2003, Nano Technology Instruments - Europe BV.
Copyright © 1998-2003, NT-MDT. All rights reserved.
Copyright © 1998-2003, NT-MDT. All rights reserved.