Un sistema UHV di analisi superficiale per la caratterizzazione dei film sottili
Misura la composizione superficiale dei primi pochi nanometri e/o micron di campioni solidi
La Workstation SIMS permette SIMS statico e dinamico ad alte prestazioni per una dettagliata analisi della composizione superficiale e per il profiling in profondità.
Overview
The SNMS facility complements the SIMS technique, providing quantification for thin film composition measurements.
Hiden’s new SIMS-on-a-Flange provides a complete SIMS facility on a single UHV conflat type flange.
Features
- Hiden MAXIM SIMS analyser operating under MASsoft 7 Professional for ppb analysis
- Integrated ioniser for efficient SNMS analysis
- Choice of differentially pumped primary excitation sources
- IG20 Gas, IG5C Caesium, IFG200 FAB or high performance liquid gallium guns
- Integral ion gun raster control with signal gating for depth profiling
- Electron flood gun option for charge neutralisation in insulator studies
- Vacuum chamber bakeout heaters
- Fast sample transfer, sample holder and manipulator with load lock
- UHV manipulator for optimum sample positioning
- SIMS elemental imaging option with ESM LabVIEW SIMS Imaging program
- Static SIMS Spectral Library available
- Automatic SIMS ion optics lens tuning
- Automatic mass alignment for optimum SIMS performance
Specifications
|
Mass range |
300, 510 or 1000 amu |
|
Minimum detectable concentration |
PPM/PPB level contamination analysis |
|
SIMS - Secondary Ion Mass Spectrometry |
Yes |
|
Analysis of ions ejected from sample surface |
Yes (primary ions of oxygen, argon or caesium) |
|
SNMS - Secondary Neutral Mass Spectrometry |
Yes |
|
Analysis of ions ejected from sample surface |
Yes (primary ions of oxygen, argon or caesium) |
|
Depth resolution |
+/- 5 nanometer |
|
Minimum detectable concentration - SIMS |
1016 atoms per cubic centimeter - species dependent |
|
Minimum detectable concentration - SNMS |
0.01% - species dependant |
|
UHV multiport chamber |
Yes |
|
Accommodates additional instrumentation |
Yes (E.g. XPS) |