Un sistema per l'analisi di neutri, radicali e ioni in UHV
Misura gli ioni, i neutri e i radicali in UHV/XHV
I sistemi EPIC e IDP hanno tutte le caratteristiche di sistemi ad alte prestazioni per l'analisi dei gas residui - ma con l'aggiunta di un bias e la capacità di misurare ioni negativi che li rendono spettrometri di massa eccezionali per la ricerca.
Overview
The EPIC system is factory-upgradeable for the inclusion of an energy-filter, either the Bessel box or 45 degree sector field type, ensuring compatibility with the Hiden plasma/SIMS series including the EQP, EQS, PSM and SIM probes.
Features
- Mass range options to 2500 amu, 6 or 9 mm pole diameter options
- Enhanced long-term Stability (less than ±0.5% height variation over 24 h)
- Ion Energy distribution by mid-axis potential scanning ±100 V, 1000 eV Option
- Ion source control for soft ionisation and appearance potential mass spectrometry
- Enhanced sensitivity for high mass transmission, Automatic mass scale alignment
- Pulse Ion Counter for continuous 1: 107 c/s decade dynamic range
- Extended dynamic range to 5x1010 c/s with Faraday option
- Enhanced contamination resistance via the RF-only pre-filter stage
- Signal gating 100 nano second resolution for energy & mass distributions vs time or TOF studies
- Temperature reading integrated into data displays for thermal desorption applications
- Integral UHV compatible shroud, Liquid Nitrogen cooled shroud option
- MASsoft control via RS232, USB or Ethernet LAN
- Upgradeable to Plasma / SIMS specification
Specifications
Mass range |
50, 300, 510, 1000, or 2500 amu |
Pulse ion counting detector |
Positive and negative ion detection |
DMM-dynamic multi mode |
Uniquely applied for the electron attachment ionization technique for electronegative gas studies |
Minimum detectable partial pressure |
5 X 10-15 mbar : 1X10-16 mbar |
Fast measurement speed |
Up to 500 measurements per second |
Analyser mounting flange | |
6mm pole diameter Mounting flange 9mm pole diameter Mounting flange |
DN-63-CF (4.5"/114mm OD Conflat type) DN-100-CF (6"/150mm OD Conflat type) |
6mm pole diameter systems adaptor 9mm pole diameter systems adaptor |
DN-35-CF (2.75”/70mm OD Conflat type) DN-63-CF (4.5”/114mm OD Conflat type) |