Un sistema UHV di analisi superficiale per la caratterizzazione dei film sottili

Misura la composizione superficiale dei primi pochi nanometri e/o micron di campioni solidi

La Workstation SIMS permette SIMS statico e dinamico ad alte prestazioni per una dettagliata analisi della composizione superficiale e per il profiling in profondità.

Overview

The SNMS facility complements the SIMS technique, providing quantification for thin film composition measurements.

Hiden’s new SIMS-on-a-Flange provides a complete SIMS facility on a single UHV conflat type flange.

Features

• Hiden MAXIM SIMS analyser operating under MASsoft 7 Professional for ppb analysis
• Integrated ioniser for efficient SNMS analysis
• Choice of differentially pumped primary excitation sources
• IG20 Gas, IG5C Caesium, IFG200 FAB or high performance liquid gallium guns
• Integral ion gun raster control with signal gating for depth profiling
• Electron flood gun option for charge neutralisation in insulator studies
• Vacuum chamber bakeout heaters
• Fast sample transfer, sample holder and manipulator with load lock
• UHV manipulator for optimum sample positioning
• SIMS elemental imaging option with ESM LabVIEW SIMS Imaging program
• Static SIMS Spectral Library available
• Automatic SIMS ion optics lens tuning
• Automatic mass alignment for optimum SIMS performance

Specifications