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NSG03/TiN

for noncontact/semicontact modes NSG03 series with TiN conductive coating, resonant frequency 47-150kHz, force constant 0,35-6,1N/m.

 

NSG03/TiN series specification

Material

Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped

Chip size

3.4x1.6x0.3mm

Reflective side

Au

Conductive coating

TiN (25nm)

Cantilever number

1 rectangular

Tip curvature radius

~ 35nm

Also available coatings

conductive PtIr, Au

Available NSG03 probe 

bare, tipless, with Al reflective coating

   

Cantilever series

Cantilever length, L±5µm

Cantilever width, W±3µm

Cantilever thickness,

T±0.5 µm

Resonant frequency, kHz

Force constant, N/m

min

typical

max

min

typical

max

NSG03

135

30

1.5

47

90

150

0.35

1.74

6.1