Plasma Cracker Source PCS-ECR Print E-mail

Features:

  • Filamentless design
    The absence of a hot filament to create the plasma, permits operation with most gases including reactive gases such as oxygen, chlorine, nitrogen and hydrogen.
  • No microwave tuning required
    Simply turn the plasma on and off.
  • Unique integrated shutter and current monitor option
    Allows beam density and residual current measurements to be made while the beam is shut off.
  • Trivial bakeout preparation ~1minute
    Remove only the microwave generator and cables (no water-jacket disassembly).
  • Built in microwave generator/tuner
    Eliminates the need for waveguide installation. The sophisticated microwave tuner allows tuning to be optimized for each mode for maximum performance.

Applications:

Suitable for use in vacuum levels ranging from HV to those found in the most demanding MBE applications.


Product description: 

The SPECS PCS-ECR source is a truly UHV compatible source. It is fully bakeable, with an all-welded stainless steel vacuum envelope, and outstanding cooling from a full length water-jacket. Through the action of the well-known electron cyclotron resonance (ECR) phenomenon, a high density plasma is created by coupling a radially symmetric 2.45GHz microwave field to ions on the 86mT surface of a multi-polar magnetic array.

A unique combination of features and options make this an extraordinarily versatile plasma source.

 

 
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Nature composes some of her loveliest poems for the microscope and the telescope.

Henry J. Tillman

 

PraMa Strumentazione Scientifica

Partita IVA n. 00668970148

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