Features:
- Mounting flange: 2.75" (NW35CF)
- With four individual pockets
- With internal water-cooling
- In vacuum length: 210 mm
- In vacuum diameter: 34 mm
- Bakeout temperature: 200° C
- Max. rod diameter 4 mm
- Up to 25mm rod feed
- Crucible size 0.07 cc
- Operating Pressure: < 10-10 - 10-5 mbar
- Power supply with controller: 300 W
Applications:
- Pt: Thin films, surface science. From rod/crucible.
- Cr: Metalising, contacting. From rod - sublimes.
- Al2O3: Optical films, oxide films. From crucible.
- C: Doping, SEM sample preparation. From rod.
- Au, Ag: Metalising, contacting. From crucible.
- Cu: Surface science. From crucible.
- Nb: From rod.
Product description:
The SPECS EBE-4 is a combined multipocket mini e-beam evaporator which
is capable of evaporating small quantities of almost any material. The
material either in rod form or in a crucible is heated by electron
bombardment from the surrounding filament allowing temperatures in
excess of 3000K to be reached. Up to 4 pockets can be fitted with a
linear drive or fixed length holder or can be upgraded by the user
later on if required. Furthermore, all pockets may be used individually
or in any combination for true co-evaporation from crucible or in rod
form with up to 25 mm rod feed when the pocket is fitted with a linear
drive. The instrument is therefore highly flexible and is well suited
to a wide range of surface science applications.
