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Wien Mass Filter (for Ion Sources) |
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Features:
- High dispersion yet small overall dimensions
- Additional port for differential pumping
- Stigmatic correction and beam adjustment
- Bakeable up do 350° C
- Beam blanking
- Retrofitable to IQE 12/38 ion source
Applications:
The Wien Mass Filter WF-IQE is used for SIMS
and SNMS depth profiling analysis in combination with an ion source for
producing a pure ion beam, free from neutral particles. In surface and
thin film analysis systems it may be used as a primary ion source for
- Dynamic SIMS and SNMS analysis, meeting most exacting requirements
- Ion scattering spectroscopy (ISS)
Product description:
For accurate depth profiling analysis
the ion beam of an electron impact or plasma ion source must be of high
purity and free from neutral particles. This is ensured by the Wien
Mass Filter which eliminates ions of unwanted isotopes and impurities
and multiplies charged ions as well as neutral particles.
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