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Fully computerized analysis and surface quality control.
Features:
- Fully computerized Surface Analysis
- Automatic quantification
- Nondestructive analysis
- Exact sample positioning and monitoring
Options:
- Small spot ion source for depth profiling
- Optical microscope for sample monitoring
- Flood Gun for charge compensation
- Fine focus electron source for AES and SEM/SAM
- UV-source for UPS
- X-Ray Monochromator
- Preparation chamber for surface processing
Applications
- Determination of layer thickness for hard disc production
- Control of wafer surface composition between different processing steps
- Composition analysis of bioactive surface
- Depth profiling of chemical concentration profiles with nm resolution
- Polymer surface composition checks following technological treatment
- General quality control in microelectronic production lines
- Adhesion problems on surfaces
Product description:
The Sage is a compact system for
demanding analysis and quality control applications. It provides fully
automated qualitative and quantitative routine ESCA analysis.
It
gives you detailed information on the surface chemistry and material
properties of conducting and insulating samples. The Sage system
provides high precision quantitative information and fast data
interpretation routines.
The SAGE ESCA System family:
The
proven automated ESCA concept SAGE is available with different analyzer
configurations including the state of the art hemispherical analyzer
PHOIBOs with small area capability and a braoad range of detatcor
options.
For an overview and technical comparison please click here.
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