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Ion and Secondary Neutral Mass Spectrometry SIMS/SNMS System.
Outstanding features of the SNMS method with electron gas postionization:
- Simple Quantification,
- High Sensitivity (Detection Limit down to 1 ppm)
- High Depth Resolution in the nm regime (<1 nm)
- Short Analysis Time
Applications:
- Analysis of conducting and insulating Material
- Impurity and Contamination Analysis in Quality Control
- Rapid Routine Depth Profiling for Industrial Applications
- Analysis of buried Interfaces
- Environmental Analysis
Product description:
The quantitative composition of every
single surface layer down to trace elements is often of crucial
importance for the quality of products. Detailed knowledge of this
means a decisive advantage over competitors. The INA-X system works on
the principle of SNMS (Secondary neutral mass spectrometry). The key
feature of the SNMS technique and advantage over the SIMS
(Secondary ion mass spectrometry) method is the strict separation
between emission and ionization of the sputtered particles from the
sample surface.
Thus, the so called Matrix effects of SIMS are eliminated.
Since
the flux of sputter removed particles consists almost exclusively of
neutrals, and each particle is monitored with a known fixed detection
probability, the SNMS signals show the sample composition directly and
quantitatively. Electron impact ionization of the sputtered neutral
particles with the ”electron-gas” of the RF-plasma results in a good
linear relationship between measured signal intensities and true
element concentrations. This makes SNMS a highly reliable and simple to
use method for quantifying sample composition.
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