|
This evaporation guide represents a survey of commonly used elements
and their physical properties determining their evaporation behaviour.
Although in the preparation of this guide every effort has been made to
ensure accuracy, completeness and clarity, it can't be guaranteed that
no errors have occurred. Therefore use this information at your own
risk, as a general guide. In any case use an independent check for
important data.
Some materials and their compounds are
extremely toxic and must be handled with great care. Manufacturers
safety and handling instructions must be strictly followed!
The
table which is listed below describes different materials (mainly
element species), recommended effusion cell types, crucible material to
be used, melting point (MP) and dedicated vapor pressure data within
the UHV and HV regime.
Material
|
Symbol
|
Recommended source type
|
Crucible
material
|
Melting Point (°C) |
Temperature (°C) for vapor pressure (Torr)
|
10-8
|
10-6
|
10-4 |
Aluminium
|
Al
|
Cold Lip Effusion Cell
|
PBN
|
660
|
685
|
812
|
972
|
Antimony
|
Sb
|
Valved Cracker, Cracker or Low Temp Effusion Cell
|
PBN
|
631
|
279
|
345
|
425
|
| Argon
|
Ar
|
ECR Plasma Source
|
Alumina
|
...
|
...
|
...
|
...
|
Arsenic
|
As |
Valved Cracker, Cracker, Valved or Low Temp Effusion Cell
|
PBN
|
817
|
104
|
150
|
210
|
Barium
|
Ba
|
Low Temp Effusion Cell
|
Ta, Mo
|
727
|
272
|
354
|
462
|
| Beryllium |
Be
|
High Temp Effusion Cell |
BeO, VC |
1287 |
707 |
832 |
997 |
BioMaterials
|
...
|
Near Ambient Effusion Cell
|
Quartz, PBN, Ta, PGR
|
...
|
...
|
...
|
...
|
Bismuth
|
Bi
|
Low Temp Effusion Cell
|
Al2O3, BeO, VC
|
271 |
329
|
409
|
517
|
Boron
|
B
|
High Temp Effusion Cell
|
C, VC
|
2075
|
1282
|
1467
|
1707
|
Cadmium
|
Cd
|
Low Temp Effusion Cell
|
Al2O3, Quartz, PBN
|
321
|
74
|
119
|
177
|
Calcium
|
Ca
|
Low Temp Effusion Cell
|
Al2O3, Quartz, PBN
|
842
|
282
|
357
|
459
|
Carbon
|
C |
Carbon Effusion Cell
|
PGR
|
3550
|
1657
|
1867
|
2136
|
Cerium
|
Ce |
High Temp Effusion Cell
|
Al2O3, BeO, VC
|
795 |
970
|
1150
|
1380
|
Cesium
|
Cs |
Near Ambient or Low Temp Effusion Cell
|
Quartz, PBN
|
29
|
-16
|
22
|
80
|
Chlorine
|
Cl
|
ECR Plasma Source
|
Al2O3
|
...
|
...
|
...
|
...
|
Chromium
|
Cr |
High Temp Effusion Cell
|
VC
|
1907
|
837
|
977
|
1157
|
Cobalt
|
Co |
High Temp Effusion Cell
|
Al2O3, BeO
|
1495
|
922
|
1067
|
1257
|
Copper
|
Cu
|
Single Filament or High Temp Effusion Cell
|
Al2O3, Mo, Ta, BeO
|
1085
|
722
|
852
|
1027
|
Dysprosium
|
Dy
|
High Temp Effusion Cell
|
Ta
|
1412
|
625
|
750
|
900
|
Erbium
|
Er
|
Dual Filament or Single Filament effusion cell
|
PBN, Ta, W
|
1529 |
649
|
777
|
897
|
Europium
|
Eu
|
Low Temp or Dual Filament effusion cell
|
Al2O3, Mo, Ta, PBN
|
822
|
283
|
361
|
466
|
Gallium
|
Ga
|
Dual Filament or Single Filament effusion cell
|
PBN, Al2O3, BeO, Quartz
|
30
|
619
|
742
|
907
|
Germanium
|
Ge
|
Dual Filament or Single Filament effusion cell
|
PBN, Al2O3, Quartz
|
938
|
812
|
947
|
1137
|
| Gold
|
Au
|
Single Filament or High Temp Effusion Cell
|
Al2O3, PBN, VC,
|
1064
|
807
|
947
|
1132
|
Hydrogen
|
H |
Thermal Gas Cracker/ECR Plasma Source or RF Plasma Source
|
...
|
...
|
...
|
...
|
...
|
Indium
|
In
|
Dual Filament effusion cell
|
Al2O3, PBN
|
157
|
488
|
597
|
742
|
Iridium
|
Ir
|
E-Beam Evaporator
|
...
|
2410
|
1850
|
2080
|
2380
|
Iron
|
Fe
|
E-Beam Evaporator or High Temp Effusion Cell
|
Al2O3, BeO
|
1538
|
858
|
998
|
1180
|
Lanthanum
|
La
|
High Temp Effusion Cell
|
Al2O3
|
920
|
990
|
1212
|
1388
|
Lithium
|
Li
|
Low Temp Effusion Cell
|
Al2O3, BeO, PBN
|
180
|
235
|
306
|
404
|
Lutetium
|
Lu
|
High Temp Effusion Cell
|
Al2O3
|
1663
|
870
|
1228
|
1376
|
Magnesium
|
Mg
|
Low Temp Effusion Cell
|
Al2O3, VC, PBN
|
650
|
185
|
246
|
327
|
Manganese
|
Mn
|
Single Filament effusion cell
|
Al2O3, BeO
|
1246
|
505
|
611
|
747
|
Mercury
|
Hg
|
Near Ambient Effusion Cell
|
Al2O3, Quartz, PBN
|
-39
|
72
|
-44
|
7 |
Methane
|
CH4
|
ECR Plasma Source
|
...
|
...
|
...
|
...
|
...
|
| Molybdenum |
Mo |
E-Beam Evaporator |
... |
2610 |
1592 |
1822 |
2117 |
Nickel
|
Ni
|
High Temp Effusion Cell
|
Al2O3, BeO,VC
|
1455
|
927
|
1072
|
1262
|
Niobium
|
Nb
|
E-Beam Evaporator
|
...
|
2468
|
927
|
1072
|
1262
|
Nitrogen
|
N
|
RF Plasma Source
|
PBN
|
...
|
...
|
...
|
...
|
Organics
|
...
|
Near Ambient Effusion Cell
|
Al2O3, Quartz, PBN
|
...
|
...
|
...
|
...
|
Oxygen
|
O
|
ECR Plasma Source
|
Alumina |
...
|
...
|
...
|
...
|
Palladium
|
Pd
|
High Temp Effusion Cell
|
Al2O3, BeO
|
1555
|
842
|
992
|
1192
|
Phosphorus
|
P |
Valved Cracker or Valved effusion cell |
Al2O3, PbN, Ta/Mo
|
44
|
54 |
88 |
192
|
Platinum
|
Pt |
E-Beam Evaporator or High Temp Effusion Cell
|
ThO2, C
|
1768
|
1292
|
1492
|
1747
|
Polymers
|
...
|
Near Ambient Effusion Cell
|
Al2O3
|
...
|
...
|
...
|
...
|
Potassium
|
K |
Low Temp Effusion Cell
|
Al2O3, Quartz, PBN
|
64
|
21 |
65 |
123
|
Rhenium
|
Re |
E-Beam Evaporator |
... |
3180
|
1928
|
2207
|
2570
|
Rhodium
|
Rh |
E-Beam Evaporator
|
...
|
1966
|
1277
|
1472
|
1707
|
Ruthenium
|
Ru |
E-Beam Evaporator
|
...
|
2310
|
1780
|
1990
|
2260
|
Scandium
|
Sc |
Dual Filament or High Temp Effusion Cell
|
Al2O3, BeO
|
1541
|
772 |
917
|
1107 |
Selenium
|
Se
|
Valved Cracker, Cracker or Low Temp Effusion Cell
|
PBN |
221
|
63 |
107 |
164
|
Silicon
|
Si |
E-Beam Evaporator
|
...
|
1414
|
992 |
1147 |
1337
|
| Silver |
Ag |
Single Filament or High Temp Effusion Cell
|
Al2O3, Mo
|
962
|
574 |
685
|
832 |
Sodium
|
Na |
Low Temp Effusion Cell
|
Quartz, PBN
|
98 |
74 |
123 |
193
|
Strontium
|
Sr |
Low Temp Effusion Cell
|
VC, Mo
|
777 |
241 |
309 |
404
|
Sulfur
|
S |
Valved Cracker, Cracker, Valved Effusion Cell
|
PBN
|
115 |
-10
|
17 |
55 |
Tantalum
|
Ta |
E-Beam Evaporator
|
...
|
2996 |
1960
|
2240 |
2590
|
Tellurium
|
Te |
Valved Cracker Effusion Cell
|
PBN |
450
|
155 |
209 |
280
|
Thallium
|
Tl |
Low Temp Effusion Cell
|
Al2O3, Quartz
|
304 |
280 |
360 |
470
|
Thorium
|
Th |
E-Beam Evaporator
|
W, Ta, Mo
|
1845
|
1430 |
1660
|
1925 |
Tin
|
Sn |
Dual Filament or Single Filament effusion cell
|
PBN |
232
|
682 |
807 |
997
|
Titanium
|
Ti |
E-Beam Evaporator
|
...
|
1660 |
1067 |
1235 |
1453
|
Tungsten
|
W |
E-Beam Evaporator
|
... |
3410
|
2117 |
2407 |
2757
|
Vanadium
|
V |
High Temp Effusion Cell or E-Beam Evaporator
|
W, Mo |
1910
|
1162 |
1332 |
1547
|
Ytterbium
|
Yb |
Low Temp Effusion Cell |
Ta |
824 |
247 |
317 |
417
|
Yttrium
|
Y |
High Temp Effusion Cell
|
Al2O3
|
1526 |
957
|
1117 |
1332
|
Zinc
|
Zn |
Low Temp Effusion Cell
|
Al2O3, Quartz, PBN
|
420
|
123 |
177 |
247
|
Zirconium
|
Zr |
E-Beam Evaporator
|
... |
1852
|
1477 |
1702 |
1987
|
This guide was prepared by Edward Graper of Lebow Corporation and is
being made available to assist SPECS GmbH customers. Neither Edward
Graper nor Lebow Corporation warranties the accuracy of this
information or the results of its applications. This guide may not be
reproduced in any way without written permission from Lebow
Corporation, which will generally be granted.
Some materials
and their compounds are extremely toxic and must be handled with great
care. Manufacturers safety and handling instructions must be strictly
followed!
Neither Lebow Corporation nor SPECS GMBH accept
responsibility for any misuse of materials or their evaporation and
deposition applications.
|
