Applications:
- Flux controll in MBE and PVD processes
- Protection shutters for viewports and RHEED Screens
- Used to create layered structures with abrupt interfaces
Product description:
The
standard shutter for effusion cells is made of a Mo rod which holds a
shutter blade covering the orifice region of the crucible. The design
of the shutter ensures a high temperatur stability during the opening
cycle. The shutter is either operated manually or by electric or
pneumatic motors using a magnetically coupled rotary motion feedthrough
based on a DN 16 CF f UHV flange. All shutter blades are made from
molybdenum, tantalum, PBN or PGR.
Features:
Effusion cell and substrate shutter:
- Integrated in effusion cell base flange or as stand-alone version
- Soft acting operation
- Linear or rotary motion
- Varying shutter size, shape and material
- Fully UHV-compatible
- Automated or manually operated
- Easy handling
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Pneumatic shutter
for effusion cell
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RHEED screen shutter:
- Rotary-actuated shutter assembly to protect RHEED screens
- 90° swing type shutter, cover >80° of viewport window
- 6" or 8" CF mounting
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Manual shutter
for RHEED screen
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