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Cracker Effusion Cell (CRC) |
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Effusion Cells
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Product description:
As, S, Sb and Se are typically
evaporating as molecules when using a standard lowtemperature- effusion
cell. To improve the quality of the epilayers it can be helpful to
crack these molecules. A special heating system attached to the top of
the Low-Temperature-Effusion cell cracks these molecules at
temperatures much higher than the evaporation temperature. Special
insulation parts are used to minimize the crosstalk between the two
heating systems.
Applications:
| Material |
Symbol
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Crucible
|
Melting Point °C |
Temperature (°C) for
Vapor Pressure (Torr)
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| |
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| Antimony |
Sb
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PBN
|
631
|
279
|
345
|
425
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| Arsenic |
As
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PBN |
817
|
104
|
150
|
210
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| Phosphorus |
P
|
PBN, Al2O3,
Ta, Mo
|
44 |
54
|
88
|
192
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| Selenium |
Se
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PBN
|
221 |
63
|
107
|
164
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| Sulfur |
S
|
PBN |
115 |
-10
|
17
|
55
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| Tellurium |
Te
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PBN |
450
|
155
|
209
|
280
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Technical data:
| Standard : |
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Type
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CRC
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Heating system
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Radiation heating, tantalum wires with PBN insulators
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Temperature range
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100°C - 800°C bulk zone
100°C - 1000°C cracker
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Temperature stability
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≤ 0.1K depending on the PID controller
1200°C effusion cell without crucible
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Max. outgas temp
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800°C - 1200°C depending on the crucible material
1200°C cracker
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Max. power
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220 W bulk zone
180 W cracker
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Max. current
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8 A bulk zone
9 A cracker
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Bakeout temperature
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250° |
Conditioning
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Heated to maximum temperature with and without crucible
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| Shipping |
Nitrogen flooded stainless steel container with valve
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| Custom : |
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Flange size
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CF 40 / CF 63
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Max outer diameter
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38 mm
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Length
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As specified
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Thermocouple type
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Two independent thermo couples type C / WRe
5% - 26% (or specified)
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Crucible material
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PBN / PGR / W / Ta / quartz
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Crucible capacity
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5 - 39 ccm (or on request)
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Options:
Molybdenum version
Crucibles with inserts
Downward looking version
Integrated shutter
Water cooling
Other dimensions
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