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Cold Lip Effusion Cell (CLC) |
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Effusion Cells
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Product description:
The cold lip effusion cell is designed
to evaporate materials like Al that tend to overflow due to the wetting
of the PBN surface. The cold orifice results a long lifetime of the
cell and low defect concentrations in the epitaxial layer.
Technical data:
Standard:
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Type
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CLC
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Heating system
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Radiation heating, tantalum wires with PBN insulators
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Temperature range
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200°C - 1400°C |
Temperature stability
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≤ 0.1K depending on the PID controller
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Max. outgas temp
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1600°C
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Max. power
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220 W
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Max. current
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8 A
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Bakeout temperature
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250°C
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Conditioning
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Heated to maximum temperature with and without crucible
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Shipping
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Nitrogen flooded stainless steel container with valve
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Custom:
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| Flange size |
CF 40 / CF 63
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Max outer diameter
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38 mm
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Length
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As specified
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Thermocouple type
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Type C / WRe 5% - 26% (or specified)
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Crucible material
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PBN / PGR / W / Ta / Mo / Quartz
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Crucible capacity
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5 - 39 ccm
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Options:
Crucibles with different inserts
Integrated shutter
Water cooling
Other dimensions
Downward looking
Molybdenum version |
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