| Plasma Cracker Source PCS-ECR |
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Features:
Applications:Suitable for use in vacuum levels ranging from HV to those found in the most demanding MBE applications.
Product description:The SPECS PCS-ECR source is a truly UHV compatible source. It is fully bakeable, with an all-welded stainless steel vacuum envelope, and outstanding cooling from a full length water-jacket. Through the action of the well-known electron cyclotron resonance (ECR) phenomenon, a high density plasma is created by coupling a radially symmetric 2.45GHz microwave field to ions on the 86mT surface of a multi-polar magnetic array. A unique combination of features and options make this an extraordinarily versatile plasma source.
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