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Electron Beam Evaporator EBE-1 |
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Features:
- Unique design, incorporating both
the high voltage and thermocouple feedthroughs (optional) on an
exclusively designed 2" linear motion thimble.
- Fixed thermocouple allowing the instrument to be used as a true e-beam heated effusion cell.
- Evaporation zone completely enclosed in a water-cooled copper shroud.
- Filament
assembly constructed as an easily replaced unit. User may replace just
the filament using standard tungsten wire. Spare filament assemblies
can be purchased or prepared in advance and can be quickly and easily
replaced without disassembling the evaporator head.
- Even
heat distribution through filament encircling the rod or crucible.
Higher temperatures possible without local damage to crucibles.
- Long filament design allowing operation at lower temperatures with a consequent improvement in filament lifetime.
- Fine control of the electron emission current.
- Simple, rugged and modular power supply design.
Power supply generates enough power to evaporate the thickest rods
(6mm) and is also robust enough to survive misuse without the dire
consequences seen in more complex failure-prone electronics.
Applications:
- Pt: Thin films, surface science. From rod/crucible.
- Cr: Metalising, contacting. From rod - sublimes.
- Al2O3: Optical films, oxide films. From crucible.
- C: Doping, SEM sample preparation. From rod.
- Au, Ag: Metalising, contacting. From crucible.
- Cu: Surface science. From crucible.
- Nb: From rod.
Product description:
The SPECS EBE-1 is a combined mini e-beam evaporator and e-beam heated
effusion cell and is capable of evaporating small quantities of almost
any material. The material either in rod form, or in a crucible, is
heated by electron bombardment from the surrounding filament. The
capacity for electrons to be directed to deliver their energy in a
confined area, leads to extremely high power densities and local
heating, allowing temperatures in excess of 3000 K to be reached.
Two modes of operation:
e-beam heated effusion cell
The
EBE-1 is designed so that an optional thermocouple may be fitted to
measure the temperature near the rod or crucible. The temperature can
therefore be used, as in conventional effusion cells, to control the
power supply via a PID controller. The result is an e-beam evaporator
with the operational characteristics, in terms of stability and
repeatability, of conventional effusion cells, with which many users
will already be familiar.
e-beam evaporator
In "standard" mode
the evaporator is controlled either manually or with the flux monitor
option. The power is adjusted to give the desired
evaporation rates.
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