Dual Filament Cell (DFC) Print E-mail
Effusion Cells

Product description:

This effusion cell is specially designed for the evaporation of gallium, indium, copper etc. Special measures are taken to prevent material condensation at the crucible orifice. An additional heating system with a separate thermocouple is installed at the top end of the crucible. Using two control circuits, this allows the adjustment of the orifice temperature (HOT-LIP temperature) independent of the bulk material temperature.


Applications:

 

Material Symbol Crucible Melting Point (°C) Temperature (°C) for Vapor Pressure (Torr)
       
10-8 10-6 10-4
Erbium Er PBN, Ta, W
1529
649
777
897
Gallium Ga PBN, Al2O3, BeO, Quartz 30
619 742 907
Germanium Ge
PBN, Al2O3, Quartz 938 812 947 1137
Indium In
Al2O3, PBN
157 488
597
742
Scandium Sc
Al2O3, BeO 1541 772
917
1107
Tin Sn
PBN 232
682
807
997

 

Technical data:

Standard:
 
Type
DFC
Heating system
Radiation heating, tantalum wires with PBN insulators
Temperature range

200°C - 1400°C bulk zone

200°C - 1400°C hot-lip 

Temperature stability
> 0.2K depending on the PID controller
Max. outgas. temp

1600°C bulk zone

1600°C hot-lip

Max. power

360 W bulk zone

120 W hot-lip

Max. current

12 A bulk zone

A hot-lip

Bakeout temperature
250°C
Conditioning
Heated to maximum temperature with
and without crucible
Shipping
Nitrogen flooded stainless steel container with valve
Custom:
 
Flange size
CF 40 / CF 63
Max outer diameter
38 mm
Length
As specified
Thermocouple type
Two independent TC's type C / WRe 5% - 26%
Crucible material
PBN /PGR / W / Ta
Crucible capacity
5 - 39 ccm

Options:

Molybdenum version
Crucibles with different inserts
 
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