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Effusion Cells
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Product description:
The carbon effusion cell EBC is used
for carbon doping in MBE. A pyrolytic graphite rod is heated by
electron bombardement to a maximum temperature of 2000° C to evaporate
elemental high purity carbon. The design prevents any ionized species
leaving the source. The flux regulation is achieved by adjusting the
emission current.
Technical data:
Standard:
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Type
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EBC
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Heating system
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Electron beam bombardment |
Temperature range
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200°C - 2200°C |
Current stability
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10-5 of the maximum emission current
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Max. outgas temp
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2300°C
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Max. power
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750 W
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Max. current
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1 A
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Bakeout temperature
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250°C
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Conditioning
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Heated to maximum temperature
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Shipping
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Nitrogen flooded stainless steel container with valve
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Custom:
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Flange size
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CF 40 / CF 63 as specified
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Max outer diameter
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38 mm / 63 mm / 100 mm as specified
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| Length |
As specified
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Thermocouple type
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Type C / WRe 5% - 26%
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Options:
Integrated shutter
Water cooling
Other dimension
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