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SPL Controller Specification
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Parameter
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Value
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Up to 4 different images with the resolution up to 4000x4000 pixels can be acquired during one scanning cycle
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3 ADC:
2 ADC for signal measurement, 1 ADC for feedback control
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16-bit ADC with preamplifier 1х, 10х, 100х, 1000х;
Software controlled low-pass filters 100Hz,300Hz,1kHz,3kHz,10kHz,30kHz (for two ADCs)
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Multiplexing of external inputs
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Number of external inputs
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5 (Ex1, Ex2, Ex3, Ex20, Ex21)
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Number of external inputs, which can be applied to the synchronous detector
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1 (Ex1)
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Phase sensitivity of synchronous detector
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0,01 degree in 1kHz bandwidth
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| Phase detector sensitivity |
PHASE1 - 0,04 degree,
PHASE2 - 0,04 degree
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Integrated two-channel pulse counter
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Impulse frequency up to 10MHz
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XYZ scanner driving voltage
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High-voltage outputs: X,-X,Y,-Y,Z,-Z at -150V to +150V
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DACs:
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Three composite DACs for X,Y,Z control
one 16-bit DAC for Bias Voltage control
one 12-bit DAC for user output
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XY RMS noise in 1000 Hz bandwidth
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0.4 ppm RMS (0.2 mV RMS)
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Z RMS noise in 1000 Hz bandwidth
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0.4 ppm RMS (0.2 mV RMS)
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Integrated demodulator for X,Y,Z capacitive sensors
Open/Closed-loop mode for X,Y control
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Generator Frequency Range
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DC – 5MHz
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Signal registration channel band pass (Deflection)
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1 kHz-5 MHz
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Signal registration band pass (Lateral Force)
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1 kHz – 5 MHz
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Bias Voltage channel band pass
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DC-500 kHz
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Modulating signals supply
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To the probe (external output);
High-voltage X,Y, Z channels;
Bias Voltage;
External output (2)
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10-input software controlled feedback, including Deflection, Lateral Force, Bias Voltage, etc
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4-input 5 MHz Lock-In with I (projection),Q (projection), R (module) outputs
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Phase detector
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Independent 4-input RMS detector
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Number of generators for modulation
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2 |
Number of additional generators for synchronous detectors
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2 |
Max load capacitance along Z
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100 nF |
Max load capacitance along XY
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50 nF |
Stepper motor control outputs
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Two DACs, 20V peak-to-peak, max current 130 mA
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Additional digital inputs/outputs
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6 |
Flexible system controller based on DSP, FPGA
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For example, it’s possible to re-program digital inputs/outputs.
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Automatic system hardware identification, control of low speed external devices (I2C bus)
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Max. cable length between the controller and SPM base or measuring heads
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2 m |
Voltage
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110/220 V |
Power consumption
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Less than 80W
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Dimensions
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445x160x500 mm3
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Weight
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16 kg
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