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Approach systems
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Changeable SPM
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Changeable SPM measuring heads basement with opportunity of installation of an objective.
Manual
X,Y stage for positioning of the measuring head relative to the
objective. Range of head positioning 5x5 mm. Manual X, Y stage for
sample positioning in the range 5x5 mm, readable resolution - 5 um,
sensitivity - 2 um.
X,Y sample scanning stage. Scan range 50x50 (+/-10%)um. Closed loop operation with the capacitance sensors.
Adjustable viewing mirror for the up-right optics CCD04o, CCD05o. Z scanner for objective Zpositioning, range 100mkm.
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