Pra.Ma.

TGZ3

Calibration grating TGZ3 for SPM Z-axis calibration (step height 535±4nm).

TGZ3

Calibration Grating TGZ3

Calibration grating TGZ3 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.

Grating description
Structure:	- Si wafer - the grating is formed on the layer of SiO2
Pattern types:	1- Dimensional (in Z-axis direction)
Step height:	TGZ3 - 535±4nm
Period:	3±0,05µm
Chip size:	5x5x0,5mm
Effective area:	central square 3x3mm

Fig.1 SEM photo of grating TGZ series

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No effect that requires more than 10 percent accuracy in measurement is worth investigating

Walther Nerns