Pra.Ma.

TGZ1

Calibration grating TGZ1 for SPM Z-axis calibration (step height 18,5±1nm).

TGZ1

Calibration Grating TGZ1

Calibration grating TGZ1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.

Grating description
Structure:	- Si wafer - the grating is formed on the layer of SiO2
Pattern types:	1- Dimensional (in Z-axis direction)
Step height:	TGZ1 - 18,5±1nm
Period:	3±0,05µm
Chip size:	5x5x0,5mm
Effective area:	central square 3x3mm

Fig.1 SEM photo of grating TGZ series

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Henry J. Tillman