TGT1 Print E-mail
tgt.jpgTest grating TGT1 is intended for for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.

tgt1a.jpg

TGT1

Image courtesy Dr.John Mamin, IBM Research Division

 

Test Grating TGT1

Test grating TGT1 is intended for:
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.

 

 

tgt1b.jpg

Grating description

Structure:

the grating is formed on Si wafer top surface

Pattern types:

array of sharp tips

Tip angle:

about 50 degrees

Tip curvature radius:

≤10nm

Period:

3±0,05µm

Diagonal period:

2,12µm

Chip size:

5x5x0,5mm

Effective area:

central square 2x2mm

Height, h:

0,3-0,5µm

 

Fig.1 SEM images of TGT1 grating
Images courtesy Dr.John Mamin,
IBM Research Division

tgt1e.jpg

tgt1d.jpg

 

 

Copyright © 2003, Nano Technology Instruments - Europe BV.
Copyright © 1998-2003, NT-MDT. All rights reserved.
 
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