Universal SPM system NTEGRA Prima Print E-mail

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NTEGRA Prima is a multifunctional Scanning Probe Microscope, it includes specially designed objective that allows sample imaging with continuous zooming in mm - Ǻ range.

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  • Equipped with a replaceable scanner with integrated capacitance sensors. A scan range of 100x100x12 µm is available.
  • XY nonlinearity: 0.05% of Peak-to-Peak by 2 value, after correction.
  • Position repeatability in the X-Y plane is maintained with an accuracy of 10-20 nm in full scan range.
  • The DualScan mode is performed with the use of the replaceable lower scanner (100x100x12 µm) and another (100x100x10 µm) upper scanner, which gives the total scan range of 200x200x22 µm.
  • The PNL controller and the mechanical parts of the PNL NTEGRA can operate in high-frequency modes, up to 5 MHz. This makes it possible to use the system both for AFAM applications and for operations with high-frequency cantilevers.
  • This system can be used in research of high-resistance materials such as thin dielectric layers on semiconductors, DLC and piezo-films, conductive polymers etc.
pdf NTEGRAPrima datasheet 1.66 Mb
 
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Arthur C.Clarke

 

PraMa Strumentazione Scientifica

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