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Universal SPM system NTEGRA Prima |
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NTEGRA Prima
is a multifunctional Scanning Probe Microscope, it includes specially
designed objective that allows sample imaging with continuous zooming
in mm - Ǻ range.
- Equipped with a replaceable scanner with integrated capacitance sensors. A scan range of 100x100x12 µm is available.
- XY nonlinearity: 0.05% of Peak-to-Peak by 2 value, after correction.
- Position repeatability in the X-Y plane is maintained with an accuracy of 10-20 nm in full scan range.
- The DualScan mode is performed with the use of the replaceable lower
scanner (100x100x12 µm) and another (100x100x10 µm) upper scanner,
which gives the total scan range of 200x200x22 µm.
- The PNL controller and the mechanical parts of the PNL NTEGRA can
operate in high-frequency modes, up to 5 MHz. This makes it possible
to use the system both for AFAM applications and for operations
with high-frequency cantilevers.
- This system can be used in research of high-resistance materials such
as thin dielectric layers on semiconductors, DLC and piezo-films,
conductive polymers etc.
 NTEGRAPrima datasheet 1.66 Mb
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