| NTEGRA platform |
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The PNL NTEGRA is a unique measuring system operating with the nanometer resolution. It includes:
The PNL NTEGRA allows to implement more than 40 probe microscopy techniques including Atomic Force Acoustic Microscopy for local Young's modulus measurements, femtoampere current measurements, nanolithography with a resolution as small as 10 nm. The PNL NTEGRA is equipped with a special temperature controlling system which makes it possible to perform measurements on samples in the temperature range from - 30°C up to 300°C (with thermal drift less than 10 nm/°C in the temperature range from - 30°C up to 200°C). The PNL NTEGRA can be operated in three scan modes: by sample, by probe and in DualScanTM (simultaneous scan by probe and by sample). This enables researchers to solve various problems: measurements with the atomic-molecular resolution, operations with large samples, imaging of large areas (up to 200x200 micron), investigation of samples with complicated relief features (up to 16 micron peak-to-valley). Scanners equipped with low-noise capacitance sensors can provide linear measurements with an accuracy as good as 0.4 %. The PNL controller allows to measure broadband (up to 5 MHz) signals. This makes it possible to use such technique as Atomic Force Acoustic Microscopy (to determine the local Young's modulus, for example). |
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