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tgs1.jpgGrating set for Z-axis SPM calibration with three different height range - 20nm, 100nm, 500m.

tgs1a.jpg

TGS1

 

 

Grating set TGS1

 

Calibration grating set TGS1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 3 grating TGZ1, TGZ2, TGZ3 with different step heights.

tgs1b.jpg

 

Grating description
Structure: - Si wafer
- the grating is formed on the layer of SiO2
Pattern types: 1- Dimensional (in Z-axis direction)
Step height: TGZ1 - 18,5±1nm
TGZ2 - 108,5±2nm
TGZ3 - 535±4nm
Period: 3±0,1µm
Chip size: 5x5x0,5mm
Effective area: central square 3x3mm

 

tgs1c.jpg

Fig.1 SEM photo of TGZ3 grating

 

 

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