Pra.Ma.

Test Grating TGG1

Grating description

Structure:

the grating is formed on Si wafer top surface

Pattern types:

1- D array of triangular steps (in X or Y direction) having precise linear and angular sizes

Edge angle:

70 degrees

Edge radius:

≤10nm

Period:

3±0,05µm

Chip size:

5x5x0,5mm

Effective area:

central square 3x3mm