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The Nano-Hardness Tester(s) is specially suited to load and penetration depth measurements at nanometer length scales. The Nano-Hardness Tester(s) can be used in the analysis of organic and inorganic soft and hard coatings. Examples are thin and multilayer PVD, CVD, PECVD, photoresist, paints lacquers, and many other types of films, covering optical, micro- electronic, protective, decorative and other applications. Substrates can be hard or soft, including metal alloys, semiconductors, glass, refractive and organic materials.
Features
- Unique top-referencing method
- Automated optical microscopic inspection before and after testing
- Feedback-controlled force actuator
- Differential capacitive measurements of indentation depth
- PC software package for automated data acquisition, storage and evaluation.
Options
- Vacuum or climatic control
- Atomic Force Microscope
- High resolution camera
- Environmental Enclosure
- X & Y High resolution table (accuracy of 0.25um)
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